SURFACE MODIFICATION OF HAFNIUM OXIDE (HFO2) FOR MICROFLUIDIC APPLICATIONS Submitted by Jayshree on Thu, 05/29/2025 - 12:32 Patent Number2453/DEL/2012Patent StatusGrantedCampusPilani CampusDepartmentMechanical EngineeringInventorsChintalapalli Vijayakumar , Niti Nipun Sharma/ Vijay KumarGranted OnWed, 06/04/2025 - 12:00